2nd Gen. Special Material Coating (UC / BONO / Silicon) – Reduced Porosity and micro crack inside the coating layer → better plasma & chemical resistance – Higher Surface Roughness (Ra) compared to Y2O3 coating layer → Hold up more particle – Minimize gas residue trapped inside the pore in coating layer

3rd Gen. TRC Coating : High Temp Coating (SH13c.f, SH24f, SH38c) – Stable to high-temp process more than 1200℃ – Surface reaction resistance ＆ control Metal, carbides ＆ compound materials – Reduced porosity and micro crack inside the coating layer – Particle and defect control from parts surface – Excellent plasma, chemical resistance Surface corrosion, Erosion ＆ Oxidation protection