・Consumable Parts

・High Performance Parts

・High Value Products

 High Performance Parts

   Y2O3
  AlN
  SiC
AlN PEC
AlN Tube
AlN More Ring
AlN Focus Ring
AlN Nozzle
AlN Shadow Ring
AlN Cover Ring
AlN Edge Ring
Y2O3 LID
Y2O3 Capture Ring
Y2O3 Small Parts
Y2O3 Cover Ring